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Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target DetectorChi Zhang,* Zheng You, Hu Huang, and Guanhua LiAuthor information ► Article notes ► Copyright and License information ► DisclaimerThis article has been cited by other articles in PMC.1. IntroductionWith the rapid development of the micro-optical-electro-mechanical sys......阅读全文
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