StudyonaTwoDimensionalScanningMicroMirrorandItsApplication...2
In order to realize the decoupling measurement for two deflection angles and obtain the large piezoresistive coefficients for the high measurement sensitivities, an n-type silicon substrate in (110) wafer is selected for the flexible beam. Two p-type silicon piezoresistors RT1 and RT2 are oriented along ±45 degrees off y-axis and a p-type silicon piezoresistor RB is oriented al......阅读全文
Study-on-a-TwoDimensional-Scanning-MicroMirror-and-Its-Application-...2
In order to realize the decoupling measurement for two deflection angles and obtain the large piezoresistive coefficients for the high measureme
Study-on-a-TwoDimensional-Scanning-MicroMirror-and-Its-Application-...1
Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target DetectorChi Zhang,* Zheng You, Hu Huang, and Guanhua LiAuthor i
Study-on-a-TwoDimensional-Scanning-MicroMirror-and-Its-Application-...4
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Study-on-a-TwoDimensional-Scanning-MicroMirror-and-Its-Application-...3
2.4. CharacteristicsThe two resonance frequencies of the two-dimensional scanning micro-mirror are 216.8 Hz and 464.8 Hz, respectively, which are
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双向电泳(twodimensional-electrophoresis,2DE)5
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